Effects of Cu Self-Capping and Ta Capping on Nanometer-Sized Cu Films Sputter-Deposited on β-Ta
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- Tanimoto Hisanori
- Graduate School of Pure and Applied Sciences, University of Tsukuba
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- Sugimori Takayuki
- Graduate School of Pure and Applied Sciences, University of Tsukuba
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- Kumamoto Shoichiro
- Graduate School of Pure and Applied Sciences, University of Tsukuba
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- Matsui Hazuki
- Graduate School of Pure and Applied Sciences, University of Tsukuba
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- Mizubayashi Hiroshi
- Graduate School of Pure and Applied Sciences, University of Tsukuba
書誌事項
- タイトル別名
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- Effects of Cu Self-Capping and Ta Capping on Nanometer-Sized Cu Films Sputter-Deposited on β-Ta
- Effects of Cu self capping and Ta capping on nanometer sized Cu films sputter deposited on v Ta
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The Cu(111) texture evolution in Cu films sputter-deposited on 35-nm β-Ta barrier layers on Si(100) (Ta/Cu) and in those capped by 5-nm Ta (Ta/Cu/Ta) were studied by X-ray diffraction (XRD). The Cu thicknesses (tCu) ranged from 5 to 500 nm. For Ta/Cu, the intensity of the Cu 111 reflection exhibited a step-like increase for tCu between 22 and 33 nm, indicating that subsequent deposition of Cu caused the Cu(111) texture evolution in the already-deposited Cu film (Cu self-capping effect). For Ta/Cu/Ta, the 5-nm Ta capping caused the Cu(111) texture evolution in the already-deposited Cu films for tCu between 10 and 30 nm (Ta capping effect). These capping effects indicate that the texture evolution took place at room temperature in nanocrystalline Cu films. The capping effects and the initial growth stage of Cu on β-Ta are discussed as they relate to Ta and Cu interfacial and grain boundary energies in the nanocrystalline structures.
収録刊行物
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- MATERIALS TRANSACTIONS
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MATERIALS TRANSACTIONS 52 (1), 1-7, 2011
公益社団法人 日本金属学会
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詳細情報 詳細情報について
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- CRID
- 1390282679225892864
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- NII論文ID
- 10027672034
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- NII書誌ID
- AA1151294X
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- ISSN
- 13475320
- 13459678
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- NDL書誌ID
- 10926778
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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