Microstructures and Electrical Properties of Ru-C Nano-Composite Films by PECVD
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- Sakata Masato
- Institute for Materials Research, Tohoku University
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- Kimura Teiichi
- Institute for Materials Research, Tohoku University
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- Goto Takashi
- Institute for Materials Research, Tohoku University
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抄録
Ruthenium-Carbon (Ru-C) nano-composite films were prepared by plasma-enhanced chemical vapor deposition (PECVD) and the effects of deposition conditions on the microstructure and electrical properies were investigated. The films consisted of agglomerated grains of 10 to 20 nm in diameter, in which Ru particles of 2.5 to 3.5 nm in diameter were dispersed in a C matrix. The C content of the films was about 90 vol%. The electrical properties of Ru-C nano-composite films as a catalytic electrode for an yttria-stabilized zirconia (YSZ) solid electrolyte were evaluated by AC impedance spectroscopy. The interfacial electrical conductivity at the Ru-C/YSZ interface was 0.2×10−3 Sm−1 at 500 K and increased with increasing temperature. The activation energy of the interfacial electrical conductivity was about 70 kJ/mol, implying an oxygen diffusion limited process at the interface.
収録刊行物
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- MATERIALS TRANSACTIONS
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MATERIALS TRANSACTIONS 48 (1), 58-63, 2007
公益社団法人 日本金属学会
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詳細情報 詳細情報について
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- CRID
- 1390282679226170240
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- NII論文ID
- 10018666077
- 130004453338
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- NII書誌ID
- AA1151294X
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- ISSN
- 13475320
- 13459678
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- HANDLE
- 10097/52322
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- NDL書誌ID
- 8597264
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- IRDB
- NDL
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