Molecular Dynamics Simulation of Thermal Conductivity of Silicon Thin Film
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- Wang Haitao
- Materials Database Station, National Institute for Materials Science
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- Xu Yibin
- Materials Database Station, National Institute for Materials Science
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- Shimono Masato
- Computational Materials Science Center, National Institute for Materials Science
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- Tanaka Yoshihisa
- Composites and Coatings Center, National Institute for Materials Science
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- Yamazaki Masayoshi
- Materials Database Station, National Institute for Materials Science
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Abstract
We computed the thermal conductivity of silicon single crystal thin film with a thickness of 25 nm–134 nm at room temperature by non-equilibrium molecular dynamics simulation. The thermal conductivity was shown to depend on the thickness of the film, and is markedly lower than that in bulk silicon. The phonon classical thermal conductivity theory, incorporating the Boltzmann transport equation, was used to establish a phonon scattering model for size dependence. The results show that boundary scattering is very strong for phonon transport in silicon thin film.
Journal
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- MATERIALS TRANSACTIONS
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MATERIALS TRANSACTIONS 48 (9), 2419-2421, 2007
The Japan Institute of Metals and Materials
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Details 詳細情報について
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- CRID
- 1390282679226285312
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- NII Article ID
- 10019853716
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- NII Book ID
- AA1151294X
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- ISSN
- 13475320
- 13459678
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- NDL BIB ID
- 8885245
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed