Correlation between sp[2]/sp[3] ratio or hydrogen content and water contact angle in hydrogenated DLC film
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- Lee Shih-Chin
- Department of Materials Science and Engineering, National Cheng-Kung University Center for Micro/Nano Science and Technology, National Cheng-Kung University
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- Tai Fong-Cheng
- Department of Materials Science and Engineering, National Cheng-Kung University Center for Micro/Nano Science and Technology, National Cheng-Kung University
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- Wei Che-Hung
- Department of Mechanical Engineering, Tatung University
書誌事項
- タイトル別名
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- Correlation between <B>sp</B><SUP><B>2</B></SUP><B>/sp</B><SUP><B>3</B></SUP> Ratio or Hydrogen Content and Water Contact Angle in Hydrogenated DLC Film
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Water contact angle has been measured to indirectly assess the sp2/sp3 ratio and hydrogen content of DLCH film under post N2 annealed treatment with O2 content under 100 ppm. XPS spectrum is used to measure the C1s bonding type and calculate the sp2/sp3 ratio. The surface morphology of DLCH film was examined by SEM and AFM. From experimental results, it seems the surface morphology was not a critical factor on water contact angle value, at least for DLCH film. A quantitative correlation between water contact angle and sp2/sp3 ratio of DLCH film is established from which the hydrogen content can be estimated by the sp2/sp3 ratio as well as Angus equation.
収録刊行物
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- MATERIALS TRANSACTIONS
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MATERIALS TRANSACTIONS 48 (9), 2534-2538, 2007
公益社団法人 日本金属学会
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詳細情報 詳細情報について
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- CRID
- 1390282679226748288
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- NII論文ID
- 10019854086
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- NII書誌ID
- AA1151294X
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- ISSN
- 13475320
- 13459678
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- NDL書誌ID
- 8885710
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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