Preparation of Highly Textured ZnO Thin Films by Pulsed Electron Deposition

DOI Web Site Web Site 参考文献46件
  • Zhan Peng
    Advanced Materials Laboratory, Department of Materials Science and Engineering, Tsinghua University
  • Li Zhengcao
    Advanced Materials Laboratory, Department of Materials Science and Engineering, Tsinghua University
  • Zhang Zhengjun
    Advanced Materials Laboratory, Department of Materials Science and Engineering, Tsinghua University

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説明

Pulsed electron deposition is a very promising means for growing high quality thin films even for complicated oxides. By investigating the influence of deposition parameters like the substrate temperature, the oxygen pressure in the chamber, as well as the pulse frequency and energy of the electrons on the growth of ZnO, the evolution of the [0002] orientation has been revealed and highly [0002] oriented ZnO thin films were obtained on Si (100) substrates at suitable conditions.

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