Fabrication and Property Evaluation of Mo Compacts for Sputtering Target Application by Spark Plasma Sintering Process
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- Park Hyun-Kuk
- Korea Institute of Industrial Technology (KITECH), Automotive Components Group
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- Ryu Jung-Han
- Korea Institute of Industrial Technology (KITECH), Automotive Components Group
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- Youn Hee-Jun
- Korea Institute of Industrial Technology (KITECH), Automotive Components Group
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- Yang Jun-Mo
- Measurement & Analysis Team, National Nanofab Center
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- Oh Ik-Hyun
- Korea Institute of Industrial Technology (KITECH), Automotive Components Group
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Abstract
Pure molybdenum compacts having a high density, purity and a fine-grained microstructure were fabricated by a spark plasma sintering process. Also, an optimized sintering condition was obtained by controlling process parameters such as temperature, pressure, and heating rate. Molybdenum compacts were prepared with diameters of Φ150 × 6.35 mm, and the characteristics of the compacts were analyzed by induction couple plasma (ICP), X-ray diffraction (XRD), and field emission scanning electron microscopy (FE-SEM). In addition, molybdenum thin films that were fabricated on a glass substrate by using sputtering equipment were analyzed by XRD, transmission electron microscopy (TEM) and secondary ion mass spectrometry (SIMS). A relative density of up to 99% and the grain size of below 8 µm were reached at the sintering temperature of 1473.15 K and the uniaxial pressure of 60 MPa. Also, molybdenum compacts having a uniform relative density and grain size were fabricated through an optimully redesigned mold and process control method. The resistivity (~0.15 μΩm) of the optimized spark plasma sintering (SPS) molybdenum thin film showed properties that are similar to those of the film prepared with conventional sintering.
Journal
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- MATERIALS TRANSACTIONS
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MATERIALS TRANSACTIONS 53 (6), 1056-1061, 2012
The Japan Institute of Metals and Materials
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Details 詳細情報について
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- CRID
- 1390282679227121664
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- NII Article ID
- 10030630029
- 130004824898
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- NII Book ID
- AA1151294X
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- ISSN
- 13475320
- 13459678
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- NDL BIB ID
- 023682137
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed