Formation of Anti-Reflection Coating by Hydrothermal Treatment of Aluminum Films and Their Stabilization by Dehydration

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  • Egashira Aki
    Department of Materials Science and Technology, Faculty of Industrial Science and Technology, Tokyo University of Science
  • Ube Takuji
    Department of Materials Science and Technology, Faculty of Industrial Science and Technology, Tokyo University of Science
  • Hosoki Yusuke
    Department of Materials Science and Technology, Faculty of Industrial Science and Technology, Tokyo University of Science
  • Harumoto Takashi
    Department of Materials Science and Technology, Faculty of Industrial Science and Technology, Tokyo University of Science
  • Ishiguro Takashi
    Department of Materials Science and Technology, Faculty of Industrial Science and Technology, Tokyo University of Science

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Anti-reflection coating, which exhibits higher transmittance than that of glass substrate itself, has been obtained by hydrothermal treatment of Al film in ultrapure water and hydrothermally-treated Al film was consisted of transparent boehmite (aluminum oxyhydroxide) (J. Appl. Phys. 106 (2009) 023524). However the stability of the hydrothermally-treated film is not enough, as boehmite contains water in its crystal structure. In this study, we examined the heat-treatment of such boehmite film. According to transmission electron microscopy and transmission Fourier-transform infrared spectroscopy, dehydration was observed at above 673 K for 1 h and boehmite transformed to a stable phase of γ-alumina. Though the structural change took place, the optical property of high transmittance remained and/or even improved.

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