Charging Effects on SEM/SIM Contrast of Metal/Insulator System in Various Metallic Coating Conditions

DOI Web Site Web Site 6 Citations 30 References
  • Kim Ki Hyun
    Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
  • Akase Zentaro
    Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
  • Suzuki Toshiaki
    JEOL Ltd.
  • Shindo Daisuke
    Institute of Multidisciplinary Research for Advanced Materials, Tohoku University

Search this article

Abstract

Scanning electron microscope (SEM) and scanning ion microscope (SIM) observations were performed to investigate the charging effect and the related contrast variation for images of conductive and non-conductive specimens under electron and Ga+ ion beam irradiations. The contrast variation in the specimens was investigated by changing the coating conditions. It was found that the contrast in conductive specimens was basically caused by differences in atomic number and that the charging effect in conductive specimens is generally smaller than that in non-conductive specimens. On the other hand, the SEM contrast of non-conductive specimens varied widely, depending on the coating conditions. These contrast variations were found to be caused by negative charges accumulated on the surface of the specimens. The SIM contrast of non-conductive specimens changed to dark when the coating condition was insufficient. The contrast variations were found to be caused by the accumulation of positive charges on the surface of specimens.

Journal

  • MATERIALS TRANSACTIONS

    MATERIALS TRANSACTIONS 51 (6), 1080-1083, 2010

    The Japan Institute of Metals and Materials

Citations (6)*help

See more

References(30)*help

See more

Keywords

Details 詳細情報について

Report a problem

Back to top