Electron Dynamics in Chemically Amplified Resists
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- Kozawa Takahiro
- The Institute of Scientific and Industrial Research, Osaka University
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- Yamamoto Hiroki
- The Institute of Scientific and Industrial Research, Osaka University
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- Nakano Atsuko
- The Institute of Scientific and Industrial Research, Osaka University
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- Saeki Akinori
- The Institute of Scientific and Industrial Research, Osaka University
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- Okamoto kazumasa
- The Institute of Scientific and Industrial Research, Osaka University
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- Tagawa Seiichi
- The Institute of Scientific and Industrial Research, Osaka University
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Abstract
As fabrication dimension has ever shrunk, the understanding of reaction mechanism has become essential for the development of chemically amplified resists. On the exposure to ionizing radiation such as electron beam, most of the radiation energy is deposited on base polymers through ionization processes. The acid generation in chemically amplified electron beam resists involves the radical cations of base polymers and electrons, both of which are generated via the ionization of base polymers. This leads to the spatial separation between protons and counter anions. In this paper, the spatiotemporal dynamics of electrons in chemically amplified resists were investigated using benzene as a model compound of aromatic polymers such as poly(4-hydroxystyrene) and novolak. The separation intrinsic to the reaction mechanism of chemically amplified resists is not negligible in the nanoscale fabrication.
Journal
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 17 (3), 449-452, 2004
The Society of Photopolymer Science and Technology(SPST)
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Details 詳細情報について
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- CRID
- 1390282679300407296
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- NII Article ID
- 130004464371
- 40006276572
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- NII Book ID
- AA11576862
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- COI
- 1:CAS:528:DC%2BD2cXmtlGgsLs%3D
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- ISSN
- 13496336
- 09149244
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- NDL BIB ID
- 6981374
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed