Quartz-Crystal-Microbalance Study for Dissolution of Resist Polymers

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The quartz crystal microbalance (QCM) method was used to obtain precise information about the dissolution behavior of resist polymers. The time evolutions of the resonance frequency and the impedance during the dissolution were measured using the QCM method. The data were simulated using the characteristic matrix method on a four-layer model. The matrix method showed Sauerbrey's relation to be invalid during the formation and dissolution of the swelling or gel layer, although Sauerbrey's relation was valid during the other development time with the constant thickness of the swelling layer. There are two kinds of swelling behaviors. In the case of thinner thicknesses of swelling layer, the rigidity of swelling layer is constant. The larger thickness of swelling layer shows the large decrease of rigidity during the development. The residue after the development shows also larger change of rigidity of a swelling layer. The characteristic-matrix analysis has shown the validity of quantitative analysis in QCM experiments.

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