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- Kudo Takanori
- Clariant Corporation, Business Unit Electronic Materials
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- Alemy Eric L.
- Clariant Corporation, Business Unit Electronic Materials
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- Dammel Ralph R.
- Clariant Corporation, Business Unit Electronic Materials
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- Kim Woo-Kyu
- Clariant Corporation, Business Unit Electronic Materials
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- Lee Sang-Ho
- Clariant Corporation, Business Unit Electronic Materials
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- Masuda Seiya
- Clariant Corporation, Business Unit Electronic Materials
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- McKenzie Douglas
- Clariant Corporation, Business Unit Electronic Materials
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- Rahman M. Dalil
- Clariant Corporation, Business Unit Electronic Materials
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- Romano Andrew
- Clariant Corporation, Business Unit Electronic Materials
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- Padmanaban Munirathna
- Clariant Corporation, Business Unit Electronic Materials
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- Chun Jun-Sung
- Cypress Semiconductor Corporation, R&D Center
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- Jung Jae-Chang
- Hynix Semiconductor Inc., Memory R&D Division
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- Lee Sung-Koo
- Hynix Semiconductor Inc., Memory R&D Division
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- Shin Ki-Soo
- Hynix Semiconductor Inc., Memory R&D Division
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- Kim Hyeong-Soo
- Hynix Semiconductor Inc., Memory R&D Division
この論文をさがす
抄録
This paper discusses the 193nm lithography of contact holes with various pitches for 100nm node. We have studied 193nm contact hole resists in view of resist components, process conditions and optical settings. Sidewall roughness was improved by optimizing photoacid generators. Side lobes were eliminated by applying higher post exposure bake temperature or modification of polymers. The influence of optical settings, types of masks and mask bias was discussed with simulation and lithographic results and guidelines for better resolution and iso-dense bias were proposed. The optimized formulation, AZ® AXTM1O50P has a high resolution combined with a large depth of focus and an iso-dense overlap window (130nm (NA=0.63) DOF 0.38μm @ Exposure latitude 10%).
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 15 (4), 549-558, 2002
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詳細情報 詳細情報について
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- CRID
- 1390282679300666368
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- NII論文ID
- 130003488508
- 40005587736
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- NII書誌ID
- AA11576862
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- COI
- 1:CAS:528:DC%2BD38Xmtlegs7k%3D
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 6219450
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可