Q-Mass Study on Cooperation Process of PCVD and Spattering for 1nm Thickness Semi-conductive C-Au-S Film
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- Morita Shinzo
- Department of Electronics, Graduate School of Engineering, Nagoya University
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- Kashem Md. Abul
- Department of Electronics, Graduate School of Engineering, Nagoya University
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Abstract
Q-mass spectroscopic measurement confirmed a HF dissociation reaction and a C-Au-S molecule synthesis during cooperation process of plasma CVD and sputtering. Then the C-Au-S molecule was expected to compose conductive grains in C-Au-S films. The semi-conductive C-Au-S film at 1 nm thickness worked successfully in a PVDF ferroelectric electron emitter by a polarization inversion method. The chemical reactions in the cooperation plasma process were discussed.
Journal
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 17 (2), 159-163, 2004
The Society of Photopolymer Science and Technology(SPST)
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Keywords
Details 詳細情報について
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- CRID
- 1390282679301422848
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- NII Article ID
- 130004464321
- 40006276528
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- NII Book ID
- AA11576862
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- COI
- 1:CAS:528:DC%2BD2cXmtlGhtbs%3D
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- ISSN
- 13496336
- 09149244
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- NDL BIB ID
- 6981199
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed