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- Kato Hirokazu
- Toshiba Corporation
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- Seino Yuriko
- Toshiba Corporation
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- Yonemitsu Hiroki
- Toshiba Corporation
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- Sato Hironobu
- Toshiba Corporation
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- Kanno Masahiro
- Toshiba Corporation
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- Kobayashi Katsutoshi
- Toshiba Corporation
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- Kawanishi Ayako
- Toshiba Corporation
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- Imamura Tsubasa
- Toshiba Corporation
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- Omura Mitsuhiro
- Toshiba Corporation
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- Nakamura Naofumi
- Toshiba Corporation
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- Azuma Tsukasa
- Toshiba Corporation
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抄録
The Photopolymer Science and Technology Award No. 142100, the Best Paper Award 2014, was presented to Hirokazu Kato, Yuriko Seino, Hiroki Yonemitsu, Hironobu Sato, Masahiro Kanno, Katsutoshi Kobayashi, Ayako Kawanishi, Tsubasa Imamura, Mitsuhiro Omura, Naofumi Nakamura, Tsukasa Azuma (Toshiba Corporation) for their outstanding contribution published in the Journal of Photopolymer Science and Technology, 26, (2013) 21-26, entitled “Electrical Via Chain Yield for DSA Contact Hole Shrink Process”.
収録刊行物
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- Journal of Photopolymer Science and Technology
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Journal of Photopolymer Science and Technology 27 (1), 7-10, 2014
フォトポリマー学会
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詳細情報 詳細情報について
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- CRID
- 1390282679301537536
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- NII論文ID
- 130004678321
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- NII書誌ID
- AA11576862
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- ISSN
- 13496336
- 09149244
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- NDL書誌ID
- 025604178
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可