The Hole Shrink Problem: Directed Self-Assembly Using Self-Consistent Field Theory

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We use self-consistent field theory (SCFT) to study the self-assembly of diblock copolymers confined in cylindrical and non-cylindrical prepatterns. This situation arises in contact holes -the hole shrink problem- where the goal is to produce a contact hole with reduced dimensions relative to a guiding prepattern. In this study, we focus on systems with a critical dimensions (CD) ranging from ~50nm to ~100nm leading to the formation of a single PMMA domain in the middle of the holes. We found that different morphologies arise from the self-assembly process and are strongly governed by the prepattern dimensions, wetting conditions, shape of prepatten as well as the polymer molecular weight. We also considered blends of diblock copolymers and homopolymers and determined optimal blending configurations that not only favor the formation of the desired cylindrical morphology but also extend the processing window relative to the pure diblock case in cylindrical confinements.

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