Manufacturing of Metal Micro Pillar with High Aspect Ratio using Negative-type Resin Mold

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  • Mukai Kohki
    Graduate School of Engineering, Yokohama National University
  • Mutaguchi Hiroaki
    Graduate School of Engineering, Yokohama National University
  • Tanaka Jun
    Graduate School of Engineering, Yokohama National University
  • Munekata Rikiya
    Graduate School of Engineering, Yokohama National University
  • Nakashima Seisuke
    Graduate School of Engineering, Yokohama National University RIKEN Advanced Research Institute

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The nickel micro pillars with high aspect ratio were manufactured using the negative-type resin mold. The resin master model was plated by nickel after the sputtering of gold, and was sublimated to take the products out. The pillar of 47.5 μm in diameter and 300 μm in height was produced by letting the bottom of the negative shape to be the cathode of the electroplating. The aspect ratio more than 8 was found to be achievable. The micromolding method will expand the producible size and shape of the metal micro products.

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