Arbitrary Patterning onto Inner Surfaces of Small-Diameter Pipes Using Laser Scan Lithography

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  • Horiuchi Toshiyuki
    Mechanical Engineering, Graduate School of Engineering, Tokyo Denki University
  • Suzuki Yuya
    Mechanical Engineering, Graduate School of Engineering, Tokyo Denki University
  • Suzuki Takeru
    Mechanical Engineering, Graduate School of Engineering, Tokyo Denki University

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Abstract

Arbitrary patterning onto inner surfaces of fine pipes with an inner diameter of 2 mm was investigated. A handmade exposure system was used as the patterning tool, and the specimen pipes were moved for relatively scanning the laser light-beam with a wavelength of 408 nm. At first, character patterns with a height of approximately 200 μm were delineated. Although several element patterns stuck out of the jointed patterns, all the delineated characters were legible, and the pattern widths were almost homogeneous except the parts where other element patterns were closely delineated. Next, arrays of V-shape patterns were delineated. Measured width fluctuation was approximately ±5 μm for the average width of 44 μm. Finally, the resolution limit or the the pattern-pitch limit of dense line-and-space patterns was investigated. As a result, the minimum pattern pitch was 29 μm, and the finest continuous resist pattern with a width of 6 μm was obtained. It was verified that arbitrary patterns were certainly delineated onto the inner surfaces of the fine pipes.

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