A novel chemical amplification type positive resist using diphenyliodonium 9,10-dimethoxyanthracene-2-sulphonate as photoinitiator.

DOI Web Site 2 Citations Open Access
  • NAITOH KAZUHIKO
    Department of Image Science and Technology, Faculty of Engineering, Chiba University
  • KANAI KIMIO
    Department of Image Science and Technology, Faculty of Engineering, Chiba University
  • YAMAOKA TSUGUO
    Department of Image Science and Technology, Faculty of Engineering, Chiba University
  • UMEHARA AKIRA
    Yoshida-minami Factory, Fuji Photo Film Co.,Ltd.

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