Possibility of femtosecond laser microfabrication applying standing wave

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  • 定在波を援用したフェムト秒レーザ加工の可能性について
  • テイザイハ オ エンヨウ シタ フェムトビョウ レーザ カコウ ノ カノウセイ ニ ツイテ

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Abstract

The femtosecond laser has potential for precision processing and modification. The advantages are both multiphoton absorption and higher photon intensity than a conventional laser. In this study, we found that intermittence grooving is generated by irradiation of overlapping glass plates with the femtosecond laser. The effect was then applied to a new microfabrication method. The intermittence grooving was generated on the mating face of glass plates by the standing wave when the glass gap was half the laser wavelength. In addition, the grooving pattern was the same as the interference pattern generated in the glass plate gap. The gap of the glass plates can be controlled to less than quarter of the laser wavelength by an actuator; the laser processing without ON or OFF control is possible. In conclusion, a new microfabrication method was developed using the standing wave generated by the femtosecond laser.

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