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Effects of on-machine tool production and micro-tool strengthening with surface modification
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- NARUSE Tetsuya
- The Institute of Physical and Chemical Research (RIKEN)
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- UEHARA Yoshihiro
- The Institute of Physical and Chemical Research (RIKEN)
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- KATAHIRA Kazutoshi
- The Institute of Physical and Chemical Research (RIKEN)
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- MIZUTANI Masayoshi
- The Institute of Physical and Chemical Research (RIKEN)
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- OHOMORI Hitoshi
- The Institute of Physical and Chemical Research (RIKEN)
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- KOIZUMI Zin
- The NEXSYS Corporation
Bibliographic Information
- Other Title
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- マイクロ切削に及ぼす機上工具作製の効果と表面改質によるマイクロツールの強靭化
- マイクロ切削に及ぼす機上工具作製の効果と表面改質によるマイクロツールの強靱化
- マイクロ セッサク ニ オヨボス キジョウ コウグ サクセイ ノ コウカ ト ヒョウメン カイシツ ニ ヨル マイクロツール ノ キョウジンカ
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Description
A system was developed to achieve consistent micro-tool production and work-piece processing. It consists of an ELID grinding system and measurement equipment on a plane in a precision 4-axis processing machine. This system allows production of tools with high accuracy, and deviation of the tool can be reduced to 30 nm. The surfaces of the produced micro-tools were investigated using advanced analytical methods. Fracture strength of the micro-tools was evaluated by nano-indentation testing, and their surface chemical properties were analyzed by XPS. The results suggest that the surface of processed micro-tools had been strengthened by penetration and diffusion of oxygen atoms into the material, and subsequent oxidation.
Journal
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- Journal of the Japan Society for Abrasive Technology
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Journal of the Japan Society for Abrasive Technology 53 (2), 99-104, 2009
The Japan Society for Abrasive Technology
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Keywords
Details 詳細情報について
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- CRID
- 1390282679309888000
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- NII Article ID
- 10024777568
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- NII Book ID
- AN10192823
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- ISSN
- 18807534
- 09142703
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- NDL BIB ID
- 10159025
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL Search
- CiNii Articles
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- Abstract License Flag
- Disallowed