Measurement of inner geometry of fine glass hole by means of indirect replica method

DOI

Bibliographic Information

Other Title
  • レプリカ法によるガラス微小穴内部形状の間接測定
  • 第１報：研磨断面直接測定との比較
  • 1<sup>st</sup> Report: Comparison to direct measurement of cross-sectional glass hole shape

Abstract

This paper describes a comparison of the replica method and the cross-sectional measurement method for measuring the inner shape of small glass holes. The former utilizes indirect measurement, while the latter uses direct measurement. First, we made a hole through a glass plate. Next, we made a replica of the hole and measured its outer surface with a non-contact measurement instrument to determine the diameter of the replica. To measure the hole using a cross-sectional method, we first ground the glass plate and exposed the inner hole shape, then we analyzed the hole circle image and calculated the diameter of the glass hole. Finally, we compared the two diameters and confirmed that both were accurate. In conclusion, the replica method is as effective as the cross-sectional measurement method for measuring the inner shape of small glass holes.

Journal

Keywords

Details 詳細情報について

  • CRID
    1390282679310361600
  • NII Article ID
    130006733577
  • DOI
    10.11420/jsat.61.659
  • ISSN
    18807534
    09142703
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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