Ductile mode cutting of lithium niobate

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  • ニオブ酸リチウムの延性モード切削に関する研究
  • ニオブサン リチウム ノ エンセイ モード セッサク ニ カンスル ケンキュウ

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Abstract

This paper describes the cutting characteristics of lithium niobate, which is used for surface acoustic wave type micro pumps, with regard to the formation of micro grooves by direct cutting. As lithium niobate is a brittle material with strong crystal orientation dependency, significant differences were observed in the characteristics of the finished surface with different directions of cutting. The ductile mode cutting of lithium niobate was found to be feasible with cutting depths of approx. 5μm or less. In addition, results of the study indicated the feasibility of the formation of minute grooves through cutting of lithium niobate using milling with an end mill.

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