クリーンルーム環境におけるHDDディスク基板へのSO<sub>2</sub>ガスの吸着特性

小松 明弘, 山本 仁三, 小川 雄司, 並木 則和, 大谷 吉生, 鍵 直樹

doi:10.11203/jar.20.153

書誌事項

タイトル別名

Adsorption of SO<sub>2</sub> Gas onto HDD Media in Cleanroom Environments
クリーンルーム環境におけるHDDディスク基板へのSO2ガスの吸着特性
クリーンルームカンキョウニオケル HDD ディスクキバンエノ SO2 ガスノキュウチャクトクセイ

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説明

An increase in storage capacity of hard disk drives (HDDs) resulted in a reduction in flying height (clearance between hard disk (HD) and magnetic head) to be in the order of nanometer. The small flying height made the HDs more sensitive to the surface contamination, which very often led to fatal failures. The present work studied the HD surface contamination with SO₂ by exposing lubricant-coated HDs to cleanroom (CR) air as well as to SO₂-containing test air. As a result, the adsorption of SO₂ in CR air was expressed by an adsorption kinetic equation based on Langmuir isotherm, while the equation was not applicable to the adsorption of SO₂ in test air. The sticking probability of SO₂ in test air onto the lubricated HD was found to be about one tenth of that for SO₂ in CR. The difference may be attributed to the enhanced adsorption of SO₂ by basic gases present in CR. This result suggests that SO₂ adsorption onto HD surface should be evaluated by the exposure to CR air and that the data obtained by the exposure to model gas might be misleading. For the suppression of HD surface contamination by SO₂, it is necessary to equip CR with an integrated air purification system for basic gases and SO₂.

収録刊行物

エアロゾル研究

エアロゾル研究 20 (2), 153-159, 2005

日本エアロゾル学会

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詳細情報詳細情報について

CRID: 1390282679318145920

NII論文ID: 10016437824

NII書誌ID: AN10041511

DOI: 10.11203/jar.20.153

COI: 1:CAS:528:DC%2BD2MXmtVCjs7g%3D

ISSN: 1881543X; 09122834

NDL書誌ID: 7400136

Web Site: http://id.ndl.go.jp/bib/7400136; https://ndlsearch.ndl.go.jp/books/R000000004-I7400136

本文言語コード: ja

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