Magnetic Properties of Co-Pt Thin Films Prepared by Sputtering Method and Application to MFM tips.

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  • ITO Hirotaka
    Department of Materials Science and Engineering, Faculty of Engineering and Resource Science, Akita Univ.
  • SAITO Hitoshi
    Department of Materials Science and Engineering, Faculty of Engineering and Resource Science, Akita Univ.
  • ISHIO Syunji
    Department of Materials Science and Engineering, Faculty of Engineering and Resource Science, Akita Univ.

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Other Title
  • スパッタ法により作製したＣｏ‐Ｐｔ薄膜の磁気特性およびＭＦＭ探針への応用
  • スパッタ法により作製したCo-Pt薄膜の磁気特性およびMFM探針への応用
  • スパッタホウ ニ ヨリ サクセイ シタ Co Pt ハクマク ノ ジキ トクセイ オヨビ MFMタンシン エ ノ オウヨウ

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CoxPt100-x (33 ≤ x ≤ 97) thin films were fabricated by RF sputtering method with various sputtering Ar gas pressure PAr and film thickness t and applied to hard magnetic tips for Magnetic Force Microscopy (MFM). The coercivity Hc of Co-Pt films, which were fabricated under high PAr, increased in the Co concentration range beyond 60at. % Co. The maximum value of μ0Hc, 0.27T was obtained for the Co79Pt21 films with PAr=10.7Pa and t=40nm. X-ray diffraction analysis revealed that hcp phase exists in the films with high coercivity. The anisotropy field μ0Ha of the hcp phase was estimated about 1.0T by singular point detection technique. The high coercivity of the films is attributed to domain wall pinning from the minor loop behavior. The MFM tips with Co79Pt21 films on Si cantilevers gave finer contrast in MFM images than commercial CoCr MFM tips for magnetic recording media.

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