Ultra Pure Water and Functionalized Ultra Pure Water

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Other Title
  • 超純水と機能水
  • 年間特集「水」--分析化学総説 超純水と機能水
  • ネンカン トクシュウ ミズ ブンセキ カガク ソウセツ チョウジュンスイ ト キノウスイ

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Description

The definition, property, application fields and purification facilities of ultra-pure water are first overviewed based on recent achievements in the technologies of water recycling and reductions in chemical consumption. Then, an ion-adsorption filter for removing ppt levels of ionic impurities from ultra-pure water, and functionalized ultra-pure water for precision cleaning in the fields of semiconductor and flat-panel displays are described as recent achievements in ultra-pure water technology.

Journal

  • BUNSEKI KAGAKU

    BUNSEKI KAGAKU 59 (4), 265-272, 2010

    The Japan Society for Analytical Chemistry

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