試作アルミナカップ電極によるヒ化インジウム中のケイ素および亜鉛の発光分光分析

大塚 繁

doi:10.2116/bunsekikagaku.17.139

試作アルミナカップ電極によるヒ化インジウム中のケイ素および亜鉛の発光分光分析

DOI Web Site Web Site

大塚繁

松下電子工業株式会社研究所

書誌事項

タイトル別名

Spectrographic determination of silicon and zinc in indium arsenide using the alumina cupelectrode technique
シサクアルミナカップデンキョクニヨルヒカインジウムチュウノケイソオヨビアエンノハッコウブンコウブンセキ
Studies on spectrochemical analysis of semiconductor materials. VI
半導体材料の発光分光分析に関する研究 (第6報)

この論文をさがす

説明

A sensitive spectrographic technique using a specially designed cup-electrode is proposed for the determination of silicon and zinc in the solution of indium arsenide. The electrode consists of an alumina cup which serves as a reservoir for the sample solution and a central tungsten-rod supporting a graphite rod, and it allows the excitation under low-voltage over damped discharge. The method is especially useful for analysis of small quantities of material. The use of hydrochloric acid has been found to improve the limits of detection. Several recommendations have been made regarding optimum conditions for the cup-elecrtode techniques. Determination-limits for silicon and zinc are 0.6 and 1.0 μg/ml, respectively, and the coefficient of variation for the determinations is within 6%. The distribution coefficients of silicon and zinc in indium arsenide crystals have been determined by applying the present method.