Lead-Zirconate-Titanate Acoustic Energy Harvester Equipped with Sound-Collecting Helmholtz Resonator

DOI Web Site 参考文献35件
  • MATSUDA Tomohiro
    Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
  • TOMII Kazuki
    Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
  • IIZUMI Satoshi
    Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
  • TOMIOKA Shungo
    Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
  • KIMURA Shu
    Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
  • TSUJIMOTO Kyohei
    Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
  • UCHIDA Yusuke
    Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
  • HAGIWARA Saori
    Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
  • MIYAKE Shuntaro
    Department of Precision Machinery Engineering, College of Science and Technology, Nihon University
  • NISHIOKA Yasushiro
    Department of Precision Machinery Engineering, College of Science and Technology, Nihon University

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抄録

Acoustic energy harvesters that function in environments where sound pressure is extremely high (∼150dB), such as in engine rooms of aircraft, are expected to be capable of powering wireless health monitoring systems. This paper presents the power generation performance of a lead-zirconate-titanate (PZT) acoustic energy harvester with a vibrating PZT diaphragm. The diaphragm had a diameter of 2mm, consisting of Al (0.1µm)/PZT (1µm)/Pt (0.1µm)/Ti (0.1µm)/SiO2 (1.5µm). The harvester generated a power of 5×10-14W under a sound pressure level of 110dB at the first resonance frequency of 6.28kHz. It was found that the generated power was increased to 2.0×10-13W using a sound-collecting Helmholtz resonator cone with a height of 60mm. The cone provided a Helmholtz resonance at 5.8kHz, and the generated power increased from 9.7×10-15W to 7.3×10-13W at this frequency. The cone was also effective in increasing the bandwidth of the energy harvester.

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