Observation of Deformation of Single Droplet Impact on Solid Surface

DOI Web Site 3 Citations 31 References

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Other Title
  • 固体表面に衝突する単一液滴変形過程の観察
  • 固体表面に衝突する単一液滴変形過程の観察(液滴物性,対象物表面粗さ及び周囲気体圧力の影響)
  • コタイ ヒョウメン ニ ショウトツ スル タンイツ エキテキ ヘンケイ カテイ ノ カンサツ(エキテキ ブッセイ,タイショウブツ ヒョウメン アラサ オヨビ シュウイ キタイ アツリョク ノ エイキョウ)
  • (Effects of Liquid Properties, Surface Roughness and Surrounding Gas Pressure)
  • （液滴物性，対象物表面粗さ及び周囲気体圧力の影響）

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In the cleaning processes of manufacturing semiconductor devices, two-fluid spray cleaning technique is widely used: however, the detailed cleaning mechanism has not been clarified yet. In this study, we focus our attention to the elementary process of this cleaning technique, i.e. a single droplet impact on a solid surface. We experimentally observe impact of single droplet on a rigid solid surface with the use of high-speed photography, and we discuss the deformation of the droplet. Especially we focus on the effects of surfaces tension, surface roughness and surrounding pressure. Water droplets always create lamella during spreading after the impact on a smooth surface in the atmospheric pressure condition. Either decrease of the surface tension or increase of the surface roughness causes droplet splash. However, decrease of the surrounding gas pressure makes droplets always create lamella even in the cases with low surface tension and rough surfaces.

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