書誌事項
- タイトル別名
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- Fabrication Techniques of Low-cost PZT Pyroelectric Sensor Adopt the Lift-off Patterned Pt Electrode
- リフトオフ ケイセイ Pt デンキョク ニ ヨル テイコスト PZTショウデンセンサ ノ サクセイホウ
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To curtail manufacturing cost of PZT pyroelectric sensor device, we reduced ion milling and ashing process by the lift-off method Pt formation and CSD method PZT thin film deposition. Remanent polarization of the PZT film on patterned Pt was approximately 2Pr = 15 µC/cm2. This value was 2/3 of all over coated Pt deposited at 600°C, but its pyroelectric current was 0.6 pA/mm2. PZT on SiO2/Si has cracks, but by splitting the SiO2 face into 20 µm rectangular through patterning Pt, these cracks were reduced to 20%. Furthermore, ladder-formed Pt electrode was satisfactory for crack-free PZT film on SiO2/Si.
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 136 (8), 337-342, 2016
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679436802688
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- NII論文ID
- 130005254424
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 027600190
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可