The Reshaping Technology for Three Dimensional Polysilicon Microstructures
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- FUKUTA Yamato
- The University of Tokyo
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- AKIYAMA Terunobu
- The University of Tokyo Institute of Microtechnology, University of Neuchatel
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- FUJITA Hiroyuki
- The University of Tokyo
書誌事項
- タイトル別名
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- Process Technology for Micromachines. The Reshaping Technology for Three Dimensional Polysilicon Microstructures.
- Reshaping Technology for Three Dimensio
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説明
This paper presents a new reshaping technology which is suitable to realize real three dimensional silicon microstructures. In this process, the elastically deformed polysilicon structure is annealed by Joule heating generated by the current passing through the structure. Plastic deformation occurs resulting in permanent three dimensional shapes. The application of this basic process to different polysilicon structures is successfully performed. Some quantitative characteristics of the annealing effects are also investigated by means of structure deformation measurements.
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 117 (1), 20-26, 1997
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679436982528
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- NII論文ID
- 10004831840
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 4106304
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
