3C-SiCナノシートにおける量子閉じ込め効果とピエゾ抵抗特性シミュレーション

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  • 中村 康一
    京都大学 学際融合教育研究推進センター エジプト日本科学技術大学 材料工学専攻

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タイトル別名
  • Quantum Confinement and Piezoresistivity Simulation in 3C-SiC Nanosheet
  • 3C-SiC ナノシート ニ オケル リョウシ トジコメ コウカ ト ピエゾ テイコウ トクセイ シミュレーション

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<p>The piezoresistivity in beta silicon carbide (3C-SiC) ultra-thin nanosheet with (001) surface orientation has been simulated on the basis of first-principles calculations of model structures. Electronic structure of the 3C-SiC nanosheet model with about 4 nm thickness has been completely verified in terms of the quantum confinement by the projection of the 3-dimensional multi-valley conduction band for bulk 3C-SiC onto the 2-dimensional reciprocal-lattice plane. For the ultra-thin 3C-SiC nanosheet models of less than 2 nm thickness, original features of themselves in electronic state can be observed beyond the quantum confinement concept. The strain response to carrier conductivity of n- or p-doped nanosheet models were calculated using band densities and their effective mass tensors with respect to carrier concentration and temperature. In the p-doped state, much larger longitudinal and transverse gauge factors for [110] direction were evaluated with the same qualitative character as p-type bulk 3C-SiC, on the condition that thickness is more than 2 nm under the quantum confinement effect.</p>

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