Investigation on the Hydrogen Gas Sensor Based on Exothermicity Reaction by Hydrogen Absorption into the Pd Film
-
- Takashima Noriaki
- Graduate School of Engineering, Tohoku Gakuin University
-
- Kimura Mitsuteru
- Graduate School of Engineering, Tohoku Gakuin University
Bibliographic Information
- Other Title
-
- パラジウムの水素吸蔵時の発熱反応を利用した水素ガスセンサの検討
- パラジウム ノ スイソ キュウゾウジ ノ ハツネツ ハンノウ オ リヨウ シタ スイソ ガスセンサ ノ ケントウ
Search this article
Abstract
We have proposed a novel micro-calorimetric hydrogen sensor based on the temperature difference detection due to the exothermic reaction caused by hydrogen absorption in the palladium (Pd) thin film as a hydrogen absorbing material, and demonstrated using the prototype hydrogen sensor with a microheater and a pair of cantilever SOI thermocouples that this H2 sensor by this proposed mechanism is surely possible. We have ascertained that the sensor output voltage is increased as the H2 concentration is increased, that the exothermic reaction ceases after finish of the hydrogen absorption, the exothermic reaction by hydrogen absorption occurs even in pure N2 gas, that larger output voltage is observed for lower ambient temperature even under no oxygen gas, and that this hydrogen sensor does not respond to the CH4 gas. We have found that the detection of H2 concentration based on the exothermic reaction is preferred to carried out after heating the sensing region rather than during heating it especially in lower H2 concentration than about 5 vol.%, because we can use the null method to detect the extremely low H2 concentration.
Journal
-
- IEEJ Transactions on Sensors and Micromachines
-
IEEJ Transactions on Sensors and Micromachines 131 (4), 148-153, 2011
The Institute of Electrical Engineers of Japan
- Tweet
Details 詳細情報について
-
- CRID
- 1390282679437098880
-
- NII Article ID
- 10027980795
-
- NII Book ID
- AN1052634X
-
- ISSN
- 13475525
- 13418939
-
- NDL BIB ID
- 11066666
-
- Text Lang
- ja
-
- Data Source
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- Abstract License Flag
- Disallowed