Direct Bonding between Silicone and Glass by Atmospheric-Pressure Surface Modification
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- Okada Wataru
- Department of Mechanical and Control Engineering, Tokyo Institute of Technology
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- Yamamoto Takatoki
- Department of Mechanical and Control Engineering, Tokyo Institute of Technology
Bibliographic Information
- Other Title
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- 大気中での表面改質によるシリコーンとガラスの固体間直接接着法
- タイキ チュウ デ ノ ヒョウメン カイシツ ニ ヨル シリコーン ト ガラス ノ コタイ カン チョクセツ セッチャクホウ
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Abstract
We experimentally demonstrated the differences of surface modification effects on silicon-based polymer of soft-type silicone-rubber and hard-type silicone-resin in contact angle and bonding strength by exposure of oxygen plasma, atmospheric pressure plasma, and vacuum-ultraviolet light, in order to investigate the availability of non-vacuum process of atmospheric plasma and vacuum-ultraviolet light for high-throughput surface modifications and bonding. We also propose the use of a hard silicone-resin for Micro Electro Mechanical Systems (MEMS) and Micro-Total Analysis Systems (μ-TAS) material to overcome drawbacks of silicone-rubber, such as easy deformation and destruction of micro / nano structures caused by its softness. As a result, any modification method successfully modified the surface of both silicone-rubber and silicone-resin up to about 10° in contact angle, and bonded to glass. However, the bonding strength between silicone-resin and glass by vacuum ultraviolet light was one order of magnitude smaller than that by oxygen plasma and atmospheric plasma bonding. The results suggest that atmospheric plasma satisfies both high-speed non-vacuum process and high-efficient way for surface modification and the following bonding.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 131 (4), 159-164, 2011
The Institute of Electrical Engineers of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679437108992
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- NII Article ID
- 10027980813
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 11066672
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed