Stability Improvement of Tactile Sensor of Normal and Shear Stresses Using Ni-Cr Thin Film Gauge

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  • Onishi Hiroyuki
    Graduate School of Engineering Science, Osaka University
  • Sohgawa Masayuki
    Graduate School of Engineering Science, Osaka University
  • Tachibana Hiroto
    Graduate School of Engineering Science, Osaka University
  • Huang Yu Ming
    Graduate School of Engineering Science, Osaka University
  • Kanashima Takeshi
    Graduate School of Engineering Science, Osaka University
  • Okuyama Masanori
    Graduate School of Engineering Science, Osaka University
  • Yamashita Kaoru
    Graduate School of Engineering Science, Osaka University Graduate School of Science and Technology, Kyoto Institute of technology
  • Noda Minoru
    Graduate School of Engineering Science, Osaka University Graduate School of Science and Technology, Kyoto Institute of technology
  • Noma Haruo
    ATR Knowledge Science Labs.

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Description

Tactile sensor consisted of micro-cantilevers has been developed to detect both normal and shear stresses, and have human-friendly surface. NiCr thin film is used as strain gauge having low resistance drift, although Si piezo-resistance gauge shows the large resistance drift induced by large temperature coefficient of resistance (TCR) and its output is unstable. TCRs of NiCr films prepared by vacuum evaporation and sputtering (at RT and 600°C) are 0.054%, 0.082%, and 0.0065%, respectively, and are much lower than that of Si, 0.25%. As a result, reduction of resistance drift and stabilization of the sensor have been obtained by using NiCr thin gauge.

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