書誌事項
- タイトル別名
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- Mechanical Property Evaluation of Micro Cantilever Fabricated Using Micro-Stereolithography
- マイクロ ヒカリ ゾウケイホウ デ サクセイ シタ コウゾウブツ ノ キカイテキ トクセイ ヒョウカ
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抄録
Dependence of elastic modulus of micro cantilever fabricated by micro-stereolithography (μSL) on irradiation laser power is investigated in this study. The samples are formed by changing the irradiation laser power of μSL system and postcure processing time. A device for measuring deflection of the micro cantilever and applied load is developed. Then, the elastic moduli of the samples are evaluated from the gradient of the measured load-deflection relation and the formula of the strength of materials. Results show that the elastic modulus of the micro cantilever made by μSL is depend on the irradiation laser power. That is, the mechanical property of micro structures can be controlled by the irradiation laser power and post cure process.
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 127 (2), 102-108, 2007
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679437200384
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- NII論文ID
- 10018480097
- 30027495987
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 8668955
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可