Preliminary study on rotational vibrating disk gyroscope
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- Fujita Takayuki
- Himeji Institute of Technology
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- Hatano Kenta
- Himeji Institute of Technology
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- Mizuno Takuya
- NGK SPARK PLUG CO., LTD.
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- Maenaka Kazusuke
- Himeji Institute of Technology
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- Maeda Muneo
- Himeji Institute of Technology
Bibliographic Information
- Other Title
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- 回転振動形ジャイロスコープに関する基礎研究
- カイテン シンドウケイ ジャイロスコープ ニ カンスル キソ ケンキュウ
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Abstract
We have developed a novel rotational vibrating disk gyroscope using a silicon bulk micromachining technique. The vibrating disk is driven in the rotational direction by electrostatic force using comb finger actuator and is supported by four notched springs. The chip has the size of 8mm×8mm square, which includes the disk shaped vibrating mass with a diameter of 2mm and a thickness of 55μm. Additionally, we adapted the ASIC by using Multi-Chip Service (MICS/MCS) for signal processing. We finally obtained the sensitivity of 28μV/(deg/sec).
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 119 (8-9), 411-416, 1999
The Institute of Electrical Engineers of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679437395968
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- NII Article ID
- 10004834189
- 20000315662
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
- http://id.crossref.org/issn/03854213
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- NDL BIB ID
- 4816584
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed
