真空度検知機能を有する赤外線イメージセンサ

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  • Infrared Radiation Image Sensor with Function of Vacuum Pressure Detection
  • シンクウド ケンチ キノウ オ ユウスル セキガイセン イメージセンサ

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We propose a new detecting method of vacuum pressure utilizing reference cells with the similar structure as pixels in the IR(infrared radiation) image sensor of which the sensitivity is greatly depended on the vacuum pressure in the sensor package. This method showed the excellent correlation between the vacuum pressure and output voltage without any additional pirani gauge requiring readout circuit which is generally utilized to detect the vacuum pressure. The proposed method is understood to realize the detection of the package vacuum pressure with detecting infrared radiation as an IR image sensor.

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