書誌事項
- タイトル別名
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- Multi-freedom Micro Manipulator with SMA Plate.
- SMA プレート オ モチイタ タジユウド マイクロマニピュレータ
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We have fabricated a micro manipulator with 1mm in diameter and 80mm in length. This manipulator has 5 degrees of freedom and uses SMA (Shape memory alloy) plates as actuators. To eliminate the assembly process and reduce the number of parts, we have developed MIF (Multi-function Integrated Film). This is a thin flexible film, which includes all electrical components; heaters, sensors, cables and electrodes, required to the SMA manipulator. As the MIF is fabricated with technology of semiconductor manufacturing, it is possible to reduce the size easily. The structure of this manipulator is very simple, because all electrical components are integrated in the MIF and the SMA plates have two functions; actuator and structural component. Therefore, complex assembly techniques are not needed. Using the strain and temperature sensors in MIF, we realized feedback control for SMA plates. As a result, this manipulator achieved 1mm in position accuracy at the tip. In addition, we have developed the device, which includes CMOS electrical circuit in MIF monolithically. For this device, electrochemical etching is applied.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 116 (8), 333-338, 1996
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679438001664
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- NII論文ID
- 130000771630
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 4037565
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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