Component Technology Development of Thermal Absolute Humidity Sensor for High Humidity and Condensation Environments

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  • 熱型絶対湿度センサの高湿度・結露環境に向けた要素技術開発
  • ネッケイ ゼッタイ シツド センサ ノ コウシツド ・ ケツロ カンキョウ ニ ムケタ ヨウソ ギジュツ カイハツ

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Abstract

<p>The author presents a thermal conductivity absolute humidity sensor whose substrate and its channel can be heated. Water droplets getting into the channel due to condensation can be removed by the substrate heater and the bridge heater setting in the channel. Thus this sensor is expected to be applied in condensation environment, such as a humidity sensor for medical ventilator. The output voltage from the prototype platinum hot wire sensor is stably obtained by using the pulse current waveform from the programmable current source under the conditions of 100%RH and 33℃.</p>

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