Load Vector Sensors using Strain Sensitive Cr-N Thin Films and Their Application

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  • Cr-Nひずみゲージ薄膜を用いた荷重ベクトルセンサとその応用
  • Cr-Nヒズミ ゲージ ハクマク オ モチイタ カジュウ ベクトルセンサ ト ソノ オウヨウ
  • Load Vector Sensors Using Strain‐Sensitive Cr‐N Thin Films and Their Applications

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A Cr-N thin film shows a gauge factor of about 16 and a temperature coefficient of resistivity (TCR) of about zero, which is expected as a new strain gauge material in the next generation. In this paper, the fabrication and characterization of a single module system of the load vector sensor using the Cr-N strain sensitive thin films, which can be applied for a sole sensor, are reported.

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