書誌事項
- タイトル別名
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- Wide Wavelength Range Tunable Fabry-Perot Filter for gas Measurement
- ガス ノウド ブンコウ ブンセキ ノ タメ ノ コウタイイキ カヘン ハチョウ ファブリ ペローフィルター
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An electrostatically driven tunable Fabry-Perot filter with wide wavelength range from 2.5 µm to 4.5 µm has been developed by silicon-CMOS-compatible and MEMS fabrication process. For the movable mirror, we adopted a three-layer membrane which consists of polycrystalline silicon, silicon nitride and polycrystalline silicon. To optimize the mechanical characteristics of the membrane, such that the membrane stress and the driving voltage, as well as to optimize the optical characteristics, the thickness of the membrane and annealing temperatures are designed such that the top and bottom layers have opposite stress to the middle layer. This paper describes the optical and mechanical designs, fabrication process and results of evaluating the fabricated devices.
収録刊行物
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- 電気学会論文誌E(センサ・マイクロマシン部門誌)
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電気学会論文誌E(センサ・マイクロマシン部門誌) 123 (10), 392-397, 2003
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679438237440
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- NII論文ID
- 10011752191
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL書誌ID
- 6719015
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 使用不可