On-chip High-voltage Silicon Photovoltaic Cell Array Made by a CMOS Post-processed Device Isolation Method for Driving a MEMS Actuator in a Remote Manner

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A small autonomous device that integrates MEMS, CMOS and photovoltaic (PV) cells has various attractive applications. However, high voltage such as 100 V is often required to drive MEMS actuators, while a single silicon PV cell generates around 0.7 V at maximum. The authors propose a method to fabricate an on-chip high-voltage silicon PV cell device out of standard silicon PV cells for driving a MEMS actuator remotely. The device consists of many PV cells connected in series with suspended bridge wiring formed with a batch post-process. It is compatible with a standard CMOS process, and therefore monolithic CMOS-MEMS-PV integration can be easily achieved. In this paper, the fabrication method and the basic characteristics such as open circuit voltage (VOC) and short circuit current (ISC) are shown. The VOC and ISC are proportional to the number of cells in series and the area of a cell respectively. Then, a demonstration of remote power feed and control of a MEMS actuator with the proposed PV device is reported.

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