書誌事項
- タイトル別名
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- An Evaluation Method of Brownian Noise in Highly Sensitive Capacitive Sensors
抄録
This paper reports a novel method of evaluating the actual Bn (Brownian Noise) in capacitive sensors for high sensitivity. By analyzing the frequency response of the electrical impedance, the proposed method provides an advantage of evaluating the Bn associated with the mechanical characteristics of capacitive sensors even when the sensors are packaged. We employed the method to measure the quality factors of the MEMS capacitive sensors, and evaluated the value of the Bn and the damping coefficients. The experimental results show a good agreement with the conventionally-known physical parameters.
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 135 (4), 142-143, 2015
一般社団法人 電気学会
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キーワード
詳細情報 詳細情報について
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- CRID
- 1390282679438422144
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- NII論文ID
- 130005061970
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- ISSN
- 13475525
- 13418939
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
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- CiNii Articles
- KAKEN
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- 抄録ライセンスフラグ
- 使用不可