書誌事項
- タイトル別名
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- Study on the behavior of oscillation circuit for QCM gas sensor
- スイショウ シンドウシ ガス センサヨウ ハッシン カイロ ノ ドウサ カイセ
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抄録
A quartz resonator with its electrode coated with sensing film is used as gas sensor and its output is resonance frequency shift due to mass loading effect. It is possible to measure frequency shift by impedance analyzer. However, the method to measure the shift using oscillation circuit is more often used for simplicity. The oscillation frequency shift deviates from that of resonance frequency due to dependency of active impedance upon its load change when viscoelastic effect accompanied with film coating of vapor sorption occurs. Then we established analysis method of oscillation frequency shift, taking dependency of active impedance upon change of load into account. Furthermore, we determined the condition of load parameters within which oscillation frequency shift agrees with resonance frequency one.
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 117 (5), 256-261, 1997
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390282679438471424
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- NII論文ID
- 10000089213
- 10005111518
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- NII書誌ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
- http://id.crossref.org/issn/13418939
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- NDL書誌ID
- 4205363
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- データソース種別
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- JaLC
- NDL
- Crossref
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- 使用不可