Dimension Optimization of Supporting Portion for a High-Frequency Quartz Resonator

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  • Ji Jing
    The Graduate School of Information, Production and Systems, Waseda University
  • Oigawa Hiroshi
    The Graduate School of Information, Production and Systems, Waseda University
  • Zhao Meng
    The Graduate School of Information, Production and Systems, Waseda University
  • Zhang Yupeng
    The Graduate School of Information, Production and Systems, Waseda University
  • Ikezawa Satoshi
    The Graduate School of Information, Production and Systems, Waseda University
  • Ueda Toshitsugu
    The Graduate School of Information, Production and Systems, Waseda University

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In this paper, dimension optimization of supporting portion was carried out for an originally designed high-frequency fundamental AT-cut quartz resonator, which has a firstly applied peripheral electrode and 10-µm-thin vibration portion to generate above 150 MHz fundamental thickness-shear vibration. Using three-dimensional finite element modeling, it is the first time; dimensions of supporting portion were optimized through improving energy trapping and reducing vibration couplings. Based on optimization results, resonators with different dimensions were fabricated and their Q-factors were measured. The experimental results were very consistent with the optimization results. Improvement of the resonator's performance ensured the validation of our method.

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