MEMS Resonator Based Insulated Voltage Sensor Withstanding Higher Voltage
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- Wada Yuuki
- Toyota Technological Institute
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- Nobunaga Naoki
- Toyota Technological Institute
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- Kumagai Shinya
- Toyota Technological Institute
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- Ishihara Hiroki
- Yazaki Corporation, Research and Technology Center
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- Ishii Makoto
- Yazaki Corporation, Research and Technology Center
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- Sasaki Minoru
- Toyota Technological Institute
Bibliographic Information
- Other Title
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- MEMS振動子を用いた絶縁型電圧センサの高耐圧化
- MEMS シンドウシ オ モチイタ ゼツエンガタ デンアツ センサ ノ コウタイアツカ
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Abstract
<p>The Si resonator is applied for measuring the voltage in a highly isolated manner. The working principle is based on the resonant frequency shift caused by the electrical field from the electrode connected to the high voltage source (supposing the battery). Here, the resonator is electrically floated, and its potential is decided by the relative position against the electrodes which are connected to the high voltage and the driving voltage. The induced voltage on the resonator is analyzed against the driving frequency. The resonance is found by the paired peaks in the amplitude curve. The setup for the electrical measurement can make the sensor system compact. A new sensor design for avoiding the electrical field concentration realizes the measurement over 400V without the breakdown. This will match with the high voltage DC power supply system.</p>
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 137 (8), 239-244, 2017
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679438924928
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- NII Article ID
- 130005876101
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 028463808
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed