Improvement of Sensitivity of MEMS Ultrasonic Sensor Using P(VDF/TrFE) Thin Films

DOI Web Site Web Site 1 Citations 9 References

Bibliographic Information

Other Title
  • P(VDF/TrFE)薄膜を用いたMEMS超音波センサの感度改善
  • P(VDF/TrFE)ハクマク オ モチイタ MEMS チョウオンパ センサ ノ カンド カイゼン

Search this article

Description

MEMS (microelectromechanical systems) ultrasonic sensors were fabricated using a polyvinylidene fluoride-trifluoroethylene (P(VDF/TrFE)) copolymer thin film on multilayered diaphragm structures. We developed a new diaphragm structure to improve the sensitivity through lowering the stiffness of the vibration part of the sensor compared to the conventional ones. The new sensor structure improved the sensitivity up to about 5 times compared to conventional the ones. Fabricated sensors with the new structure showed their sensitivity, resonant frequency and Q-value as -74 dB (1V/Pa = 0 dB), 89.2 kHz and 24, respectively.

Journal

Citations (1)*help

See more

References(9)*help

See more

Keywords

Details 詳細情報について

Report a problem

Back to top