Thermoelectric Infrared Sensors with High Responsivity for Automotive Applications
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- Hirota Masaki
- Nissan Motor
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- Satou Fuminori
- Nissan Motor
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- Morita Shinichi
- Nissan Motor
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Abstract
This paper presents the structure and fabrication process of a thermoelectric infrared sensor that provides high responsivity and a low cost potential. The processes for obtaining a precisely patterned Au-black infrared absorbing layer and reducing the internal stress of the Si3N4 layer deposited by LP-CVD achieve both high responsivity and an excellent time constant. A prototype sensor, having external dimensions of 160μm×160μm and six pairs of thermopiles, achieved responsivity of 2100V/W and a time constant of 25msec at a pressure of 7.33Pa. This Performance is suitable for automotive applications.
Journal
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- IEEJ Transactions on Sensors and Micromachines
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IEEJ Transactions on Sensors and Micromachines 121 (6), 325-330, 2001
The Institute of Electrical Engineers of Japan
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Details 詳細情報について
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- CRID
- 1390282679439490304
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- NII Article ID
- 10007453098
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- NII Book ID
- AN1052634X
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- ISSN
- 13475525
- 13418939
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- NDL BIB ID
- 5780224
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed