Microfabricated Double Junction Reference Electrode and its Application to a One-Chip Ca<sup>2+</sup> Sensor

Taura Takumi, Suzuki Hiroaki

doi:10.1541/ieejsmas.121.452

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ダブルジャンクション型微小参照電極とそのワンチップCa<sup>2+</sup>イオンセンサへの応用
ダブルジャンクションガタビショウサンショウデンキョクトソノワンチップ Ca 2 イオンセンサエノオウヨウ

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Description

A one-chip Ca²⁺ ion sensor integrated with a micro double junction Ag/AgCl reference electrode was microfablicated. The thin-film Ag/AgCl element used in the reference electrode features a polyimide protecting layer and the AgCl layer grown from a slit in the polyimide layer. The container for the internal KCl solution and a liquid-junction were formed with an SU-8 thick-film photoresist. KCl was incorporated in the micro container in a solid powdered form and the area was passivated with a silicone rubber. Another junction was formed at the end of the passivation. The double junction reference electrode could maintain a stable potential for approximately 80h. The Ca²⁺ ion-selective electrode was fabricated by forming an ion-selective membrane on one part of a silicon micro container formed by anisotropic etching. The one-chip Ca²⁺ ion sensor was constructed using the Ca²⁺ indicator electrode and the miniaturized liquid-junction reference electrode. A linear relationship was obtained between the indicator electrode potential and Ca²⁺ activity for Ca²⁺ activity higher than 10^-4. Sensitivity was 30.3mV/decade.

Journal

IEEJ Transactions on Sensors and Micromachines

IEEJ Transactions on Sensors and Micromachines 121 (8), 452-457, 2001

The Institute of Electrical Engineers of Japan

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