Study on a Gas Sensor with Low Power Consumption Using Microbridge Structure

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  • マイクロブリッジ構造を用いた低消費電力ガスセンサの研究
  • マイクロブリッジ コウゾウ オ モチイタ テイショウヒ デンリョク ガスセンサ ノ ケンキュウ

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Since semiconductor thin film gas sensors generally show a maximum sensitivity in the range of 200-400°C, it is necessary to implement a heater. However, the consumed power by the heater is large. So the reduction of heater power is one of important subjects.<br>In this research, a new microbridge structure has been developed by surface micromachining on a sapphire substrate; both a micro sensor and a micro heater are fabricated on an alumina microbridge. The sensing film has a double layer structure; the first layer is a thin-film composed of Fe2O3+TiO2 (5mol%) +MgO (4mol%) and the second layer is a thin-film composed of SnO2+V2O5(4mol%). The micro heater and the electrode are composed of Pt+W(5mol%). The sensor shows a sensitivity to NO, NO2, and H2. The consumed power of the heater is found to be about 1/2 compared to that of a conventional one directly fabricated on a substrate.

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