Results of Inter-laboratory Tests among SASJ on Accurate Mass Scale Calibration of ToF-SIMS
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- Abe Yoshimi
- Materials Analysis Center, Mitsubishi Chemical Group Science and Technology Research Center, Inc.
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- Itoh Hiroto
- Konicaminolta Technology Center, Inc.
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- Otomo Shinya
- Yokohama R&D Laboratories, Furukawa Electric Co., Ltd.
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- ToF-SIMS Working Group
- Surface Analysis Society of Japan
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抄録
To evaluate the present errors in the calibration of the mass scale of time-of-flight secondary ion mass spectrometry (ToF-SIMS) in the practical field of Japanese industries, ToF-SIMS Working Group (WG) of Surface Analysis Society of Japan (SASJ) conducted the inter-laboratory studies among 14 instruments in 2007, 2008 and 2009. There was significant scatter over 200 ppm in the relative mass accuracy at the first inter-laboratory test in 2007. Clearly, this is poor compared with the requirement for identification. However, the great deviation in the mass accuracy has been dramatically decreased at the second and third inter-laboratory tests by the accumulating knowledge through the discussion among the WG. Based on the results obtained, a practical guide to analysts for mass scale calibration will be provided in near future.
収録刊行物
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- Journal of Surface Analysis
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Journal of Surface Analysis 17 (3), 186-189, 2011
一般社団法人 表面分析研究会
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詳細情報 詳細情報について
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- CRID
- 1390282679448008192
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- NII論文ID
- 130005138936
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- NII書誌ID
- AA11448771
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- ISSN
- 13478400
- 13411756
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- NDL書誌ID
- 11077409
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 使用不可